Product Function Introduction
u The equipment is controlled by the 6-dimensional electric linear axis and the 6-dimensional manual rotary axis, and a special algorithm can quickly find the best signal position.
u Compatible with the coupling of quartz glass-based and silicon-based chip materials.
u Process operation, all types of AWG products can be compatible and coupled.
u The automatic light-finding time of a single product is less than 15 seconds. Coupling repeatability < 0.1dB.
u Test the IL value of the center wavelength of the four channels and save it to the database.
u It has the function of adjusting balance and optimizing to ensure the uniformity of each channel .
u The distance sensor is used to automatically control the distance of the adhesive layer (accuracy 2μm) to ensure repeatability and consistency.
u The operation is simple, and there is no dependence on skilled operator. Operator only need to use CCD to assist in parallel operation. The training period for novice employees does not exceed 1 week.
System Performance Index
Axis | X | Y | Z | θx | θy | θz |
Movement distance | 20m | ±3℃ | ±10℃ | |||
Resolution | 1µm/Pulse (Fu11)0.05µm Pulse(MS1/20) | 33.8”/ Scale | 33.4”/ Scale | 33.4”/ Scale | ||
Max Speed | 20mm/sec | 15度/sec | ||||
Unidirectional positioning accuracy | 5µm | 1µm | ||||
Repeatability positioning accuracy | ±0.3µm | ±0.005µm |